Self-Sealing Complex Oxide Resonators - Institut Galilée Université Paris 13
Article Dans Une Revue Nano Letters Année : 2022

Self-Sealing Complex Oxide Resonators

Martin Lee
Ruben H Guis
  • Fonction : Auteur
Ulderico Filippozzi
  • Fonction : Auteur
Dong Hoon Shin
  • Fonction : Auteur
Thierry C van Thiel
Stijn P Paardekooper
  • Fonction : Auteur
Johannes R Renshof
  • Fonction : Auteur
Herre S J van der Zant
Andrea D Caviglia
  • Fonction : Auteur
Gerard J Verbiest
Peter G Steeneken
  • Fonction : Auteur

Résumé

Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membranesurface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si3NO4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.
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Dates et versions

hal-04873127 , version 1 (09-01-2025)

Identifiants

Citer

Martin Lee, Martin P Robin, Ruben H Guis, Ulderico Filippozzi, Dong Hoon Shin, et al.. Self-Sealing Complex Oxide Resonators. Nano Letters, 2022, 22 (4), pp.1475-1482. ⟨10.1021/acs.nanolett.1c03498⟩. ⟨hal-04873127⟩
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